Multilayer dielectric memory device

ABSTRACT

A memory device has multiple dielectric barrier regions. A memory device has multiple barrier regions that provide higher or lower current-voltage slope compared to a memory device having a single barrier region. The device also has electrode regions that provide further control over the current-voltage relationship.

This application is a continuation of U.S. patent application Ser. No.12/976,266 filed Dec. 22, 2010, the content of which is herebyincorporated by reference.

BACKGROUND

Physical scaling of transistor-based nonvolatile memory devices such asa flash memory device faces many challenges. Alternative totransistor-based memory devices and memory arrays are being considered.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view of a memory stack integrated with anaccess transistor.

FIG. 2 a is a cross-sectional view an isolated memory stack comprisingtwo dielectric barrier regions.

FIG. 2 b is a cross-sectional view an isolated memory stack comprisingtwo dielectric barrier regions with a region, where the first dielectricbarrier region has a sub-region.

FIG. 2 c is a cross-sectional view an isolated memory stack comprisingtwo dielectric barrier regions with a region, where the seconddielectric barrier region has a sub-region.

FIG. 3 is a cross-sectional view an isolated memory stack comprisingthree dielectric barrier regions.

FIG. 4 a depicts a schematic energy-distance diagram of a memory stackcomprising two dielectric barrier regions under a condition where anegative voltage bias is applied to the first electrode region.

FIG. 4 b depicts a schematic energy-distance diagram of a memory stackcomprising two dielectric barrier regions under a condition where apositive voltage bias is applied to the first electrode region.

FIG. 5 a depicts a schematic energy-distance diagram of a memory stackcomprising three dielectric barrier regions under a condition where anegative voltage bias is applied to the first electrode region.

FIG. 5 b depicts a schematic energy-distance diagram of a memory stackcomprising three dielectric barrier regions under a condition where apositive voltage bias is applied to the first electrode region.

FIGS. 6 through 9 are cross-sectional views illustrating the steps ofmemory stacks integrated with access transistors.

FIG. 10 is a top-down view illustrating an example embodiment of amemory array in a “cross-point” configuration.

FIG. 11 is a cross-sectional view of a memory device comprising twodielectric barrier regions in “cross-point” configuration.

FIG. 12 is a cross-sectional view of a memory device comprising threedielectric barrier regions in “cross-point” configuration.

DETAILED DESCRIPTION OF EXAMPLE EMBODIMENT

In various embodiments, a memory device comprising dielectric barrierregions and its fabrication methods are described. In the followingdescription, various embodiments will be described. However, a person ofordinary skill in the art will recognize that the various embodimentsmay be practiced without one or more of the specific details, or withother replacement and/or additional methods, materials, or components.In other instances, well-known structures, materials, or operations arenot shown or described in detail to avoid obscuring aspects of variousembodiments of the invention. Similarly, for purposes of explanation,specific numbers, materials, and configurations are set forth in orderto provide a thorough understanding of the invention. Nevertheless, theinvention may be practiced without specific details. Furthermore, it isunderstood that the various embodiments shown in the figures areillustrative representations and are not necessarily drawn to scale.

Reference throughout this specification to “one embodiment” or “anembodiment” means that a particular feature, structure, material, orcharacteristic described in connection with the embodiment is includedin at least one embodiment that falls within the scope of the invention,but do not denote that they are necessarily present in every embodiment.Thus, the appearances of the phrases “in one embodiment” or “in anembodiment” in various places throughout this specification are notnecessarily referring to the same embodiment of the invention.Furthermore, the particular features, structures, materials, orcharacteristics may be combined in any suitable manner in one or moreembodiments. Various additional layers and/or structures may be includedand/or described features may be omitted in other embodiments.

Various operations will be described as multiple discrete operations inturn, in a manner that is most helpful in understanding the invention.However, the order of description should not be construed as to implythat these operations are necessarily order dependent. In particular,these operations need not be performed in the order of presentation.Operations described may be performed in a different order, in series orin parallel, than the described embodiment. Various additionaloperations may be performed and/or described operations may be omittedin additional embodiments.

It is to be understood that when an element is referred to as being“on,” “connected to,” or “coupled to” another element or layer, it maybe directly on, connected, or coupled to the other element, oralternatively, intervening elements may be present between the elementand the other element. When an element referred to as being “directlyon,” “in contact with,” “directly connected to,” or “directly coupledwith,” it may be directly on, in contact with, directly connected to, ordirectly coupled to, without intervening elements.

It is to be understood that spatially descriptive terms, e.g., “above,”“below,” “beneath,” “upper,” “lower” and the like, may be used herein todescribe the relative spatial relationship of one element, component, orregion to another element, component, or region, and that the spatiallydescriptive terms encompass different orientations of one element,component, or region in an embodiment. For example, if an embodimentdescribes an element as “below” another element, the same element wouldbe “above” the other element when the embodiment is turned upside down.

FIG. 1 is a cross-sectional view illustrating an example embodiment of amemory stack 140 that is integrated with an access transistor 100. Thememory stack 140 and the access transistor 100 may be formed on asubstrate 101 comprising a Si wafer. In other embodiments, the substrate101 may be any substrate comprising a semiconducting material such asGaAs, InAs, InGaAs, Ge, or silicon-on-insulator. In other embodiments,the substrate 101 may have partially or completely fabricatedstructures, components, or circuits. For example, the substrate 101 mayinclude integrated circuits with various components such as transistors,diodes, or interconnects, which may or may not be electrically coupledto the memory stack 140 or the access transistor 100.

The access transistor 100 comprises a gate dielectric 106, a gate 108 onthe gate dielectric 106, a source 104, a drain 102, and spacers 110 and112. The access transistor 100 also includes a source contact 114 and adrain contact 116. In an embodiment, the memory stack 140 may be coupledto the drain 102 of the transistor 100 through the drain contact 116. Inanother embodiment, the memory stack 140 may be coupled to the source104 of the access transistor 100 through the source contact 114. Inother embodiments, different arrangements of coupling the memory 140 tothe access transistor 100 may be possible.

The memory stack comprises a first electrode region 120, a firstdielectric barrier region 124, a second dielectric barrier region 128,and a second electrode region 132.

A memory cell may be accessed for various operations including read,write, inhibit, and erase through the access transistor 100. In anexemplary operation, a gate voltage may be placed on the gate 108, and amemory access voltage may be placed on the second electrode region 140.In another exemplary operation, a gate voltage may be placed on the gate108, and a memory access voltage may be placed on the source 104 throughthe source contact 114.

A read operation may be an operation that detects a read voltage, a readcurrent, or both, through the second electrode region 132 while a readgate voltage is applied to the gate 108. In an embodiment, a readcurrent may be detected while a positive read voltage is applied on thesecond electrode region 132 contemporaneously with a read gate voltageapplied on the gate 108. In another embodiment, a read current may bedetected while a negative read voltage is applied on the secondelectrode region 132 contemporaneously with a read gate voltage appliedon the gate 108. In an embodiment, a read operation may benon-destructive and induces an insignificant change to the memory stack140 such that when a first, a second, and a third read operations areperformed in immediate succession, the third read operation yieldssubstantially the same read voltage, read current, or both compared tothe first read operation. In another embodiment, a read operation may bedestructive and induces a significant change to the memory stack 140such that when a first, a second, and a third read operations areperformed in immediate succession, the third read operation yieldssubstantially the same read voltage, read current, or both compared tothe first read operation.

A write operation may be an operation that induces substantial change tothe memory stack 140 such that a subsequent read operation performedafter performing a write operation yields substantially the readvoltage, read current, or both compared to a read operation performedprior to the write operation. In an embodiment, the write operation maybe performed with a write voltage on the second electrode region 132that is of the same voltage polarity as the read voltage polarity. Inanother embodiment, the write operation may be performed with a writevoltage on the second electrode region 132 that is of the oppositevoltage polarity as the read voltage polarity. In an embodiment, theresult of a write operation may be a higher subsequent read current,read voltage, or both. In another embodiment, the result of a writeoperation may be a lower subsequent read current, read voltage, or both.

An erase operation may be an operation that induces a substantiallyopposite change in the read current, read voltage, or both, compared tothe write operation. In an embodiment, the erase operation may beperformed with an erase voltage on the second electrode region 132 whichis of the same voltage polarity as the read voltage polarity. In anotherembodiment, the erase operation may be performed with an erase voltageon the second electrode region 132 which is of the opposite voltagepolarity as the read voltage polarity. In an embodiment, the result ofan erase operation may be a higher subsequent read current, readvoltage, or both. In another embodiment, the result of an eraseoperation may be a lower subsequent read current, read voltage, or both.

FIG. 2 a shows an example embodiment of an isolated memory stack 158.The isolated memory stack 158 comprises a first electrode region 142, afirst dielectric barrier region 146, a second dielectric barrier region150, and a second electrode region 154. In other embodiments, the firstdielectric barrier region 146 may be referred to as a first memorybarrier region. Similarly, the second dielectric barrier region 150 maybe referred to as a second memory barrier region.

Referring to FIG. 2 a, the first electrode region 142 may comprise ametallic element. In an embodiment, the first electrode region 142 maycomprise an element chosen from the group consisting Ti, Ta, Pt, Ru, Ni,W, Al, and Cu. In another embodiment, the first electrode region 142 maycomprise a metal oxide or a metal nitride, such as TiN, TaN, WO, SrRuO,etc. It is to be understood that metal oxides and metal nitrides mayhave a rage of composition. In another embodiment, the first electroderegion 142 may comprise a doped semiconductor, such as heavily doped Sior Ge.

In any given embodiment, the material choice for the first electroderegion 142 may be made based upon the work function or the effectivework function of the material. An ordinary person skilled in the artwill appreciate that for a metallic material, a more practical parametermay be the effective work function, which may be an apparent workfunction specific to the system being measured, instead of the workfunction measured in relation to vacuum energy level. In an embodiment,the first electrode region 142 may comprise a metal whose work functionor the effective work function ranges from 2.7 eV (electron-volts) to3.5 eV. In another embodiment, the first electrode region 142 maycomprise a metal whose work function or the effective work functionranges from 3.5 eV to 4.3 eV. In yet another embodiment, the firstelectrode region 142 may comprise a metal whose work function or theeffective work function ranges from 2.7 eV to 4.3 eV.

FIG. 2 a shows a first dielectric barrier region 146 on the firstelectrode region 142. The first dielectric barrier region 146 has afirst thickness. In an embodiment, the first thickness can be 0.5-2 nm.In another embodiment, the first thickness can be 2-5 nm. In anotherembodiment, the first thickness can be 5-10 nm. In yet anotherembodiment, the first thickness can be 0.5-10 nm.

It is to be understood that the first dielectric barrier region 146 maybe substantially smooth and/or substantially planar in some embodiments.In other embodiments, the first dielectric barrier region 146 may not besubstantially smooth and/or substantially planar. Accordingly, the firstthickness of the first dielectric barrier region 146 may not be a singlevalue. In an embodiment, the first thickness may be an average thicknessof multiple measurements across the first dielectric barrier region 146.In another embodiment, the first thickness may be a minimum thickness ofmultiple measurements across the first dielectric barrier region 146. Inanother embodiment, the first thickness may be a maximum thickness ofmultiple measurements across the first dielectric barrier region 146. Inyet another embodiment, the first thickness may be a thickness measuredacross at least one location across the first dielectric barrier region146.

The first dielectric barrier region 146 has a first dielectric constant.In an embodiment, the first dielectric constant can be 3-7. In anotherembodiment, the first dielectric constant can be 7-10. In yet anotherembodiment, the first dielectric constant can be 3-10.

The first dielectric barrier region 146 is further characterized by afirst barrier height between the first dielectric barrier region 146 andthe first electrode region 142. In an embodiment, the first barrierheight is between 0.5 eV and 2.0 eV. In another embodiment, the firstbarrier height is between 2.0 eV and 3.0 eV. In another embodiment, thefirst barrier height is between 3.0 eV and 4 eV. In yet anotherembodiment, the first barrier height is between 0.5 eV and 4 eV.

The first dielectric barrier region 146 comprises a first barriermaterial. In an embodiment, the first dielectric barrier region 146 maycomprise a dielectric based on a single metal oxide, a single metalnitride, or a single metal oxynitride of Si, Al, Mg, La, Gd, Dy, Pd orSc. For example, a single metal oxide may be SiO₂ or Al₂O₃. In anotherembodiment, the first dielectric barrier region 146 may comprise adielectric based on a multiple metal oxide, a multiple metal nitride, ora multiple metal oxynitride containing metals chosen from a groupconsisting of Si, Al, Hf, Zr, Mg, La, Y, Gd, Dy, Pd and Sc. For example,a multiple metal oxide may be HfSiO₄ or LaAlO₃.

It is to be understood that the word “stoichiometric” describes a stablematerial composition under ordinary conditions. For example, a personhaving ordinary skill in the art will understand that a stoichiometricoxide of silicon will be SiO₂, whose metal to oxygen ratio issubstantially close to 2. Similarly, the word “sub-stoichiometric”describes a material composition which substantially departs from thestoichiometric composition. For example, it will be understood that asub-stoichiometric oxide of silicon will be SiO_(x), where x issubstantially less than its stoichiomtric value of 2. Similarly, asub-stoichiometric multiple metal oxide of silicon and hafnium will beHfSiO_(x), where x is substantially less than its stoichiometric valueof 4.

FIG. 2 b shows an example embodiment wherein the first dielectricbarrier region 146 comprises a first dielectric sub-region 148comprising a dielectric whose composition departs from itsstoichiometric composition by 10 to 30%. In another embodiment, thefirst dielectric barrier region 146 may comprise a first dielectricsub-region 148 comprising a dielectric whose composition departs fromits stoichiometric composition by 30% to 50%. In another embodiment, thefirst dielectric barrier region 146 may comprise a first dielectricsub-region 148 comprising a dielectric whose composition departs fromits stoichiometric composition by 50% to 70%. In yet another embodiment,the first dielectric barrier region 146 may comprise a first dielectricsub-region 148 comprising a dielectric whose composition departs fromits stoichiometric composition by 10% to 70%. It is to be understoodthat while in the embodiment in FIG. 2 b, the first dielectricsub-region 148 is located in the lower portion of the first dielectricbarrier region 146, other embodiments may have the first dielectricsub-region 148 located anywhere within the first dielectric barrierregion 146.

In an embodiment, the composition of the first dielectric barrier region146 may be graded such that its composition varies continuously acrossits thickness by 10 to 30%. In another embodiment, the composition ofthe first dielectric barrier region 146 may be graded such that itscomposition varies continuously across its thickness by 30 to 50%. In anembodiment, the composition of the first dielectric barrier region 146may be graded such that its composition varies continuously across itsthickness by 50 to 70%. In yet another embodiment, the composition ofthe first dielectric barrier region 146 may be graded such that itscomposition varies continuously across its thickness by 10 to 70%.

In an embodiment, the first dielectric barrier region 146 may be indirect contact with the first electrode region 142. In anotherembodiment, the first dielectric barrier region 146 may be separated byone or more interfacial layers comprising at least one element differentfrom elements that comprise either the first electrode region 142 or thefirst dielectric barrier region 146.

FIG. 2 a also shows a second dielectric barrier region 150 on the firstelectrode region 142. The second dielectric barrier region 150 has asecond thickness different than the first thickness of the firstdielectric barrier region 146. In an embodiment the second thickness canbe 2-5 nm. In another embodiment, the second thickness can be 5-10 nm.In yet another embodiment, the second thickness can be 10-20 nm. In anembodiment, the second thickness of the second dielectric barrier region150 is greater than the first thickness of the first dielectric barrierregion 146.

It is to be understood that the second dielectric barrier region 150 maybe substantially smooth and/or substantially planar in some embodiments.In other embodiments, the second dielectric barrier region 150 may notbe substantially smooth and/or substantially planar. Accordingly, thesecond thickness of the second dielectric barrier region 150 may not bea single value. In an embodiment, the second thickness may be an averagethickness of multiple measurements across the second dielectric barrierregion 150. In another embodiment, the second thickness may be a minimumthickness of multiple measurements across the first dielectric barrierregion 150. In another embodiment, the second thickness may be a maximumthickness of multiple measurements across the second dielectric barrierregion 150. In yet another embodiment, the second thickness may be athickness measured across at least one location across the seconddielectric barrier region 150.

The second dielectric barrier region 150 has a second dielectricconstant different from the second dielectric constant of the firstdielectric barrier region 146. In an embodiment, the second dielectricconstant can be 7 to 20. In another embodiment, the second dielectricconstant can be 20-100. In another embodiment, the second dielectricconstant can be 100 to 3000. In yet another embodiment, the seconddielectric constant can be 100 to 3000.

In an embodiment, the second dielectric constant of the second barrierregion 150 is 2 to 5 times higher than the first dielectric constant ofthe first dielectric barrier region 146. In another embodiment, thesecond dielectric constant of the second barrier region 150 is 5 to 20times higher than the first dielectric constant of the first dielectricbarrier region 146. In another embodiment, the second dielectricconstant of the second barrier region 150 is 20 to 1000 times higherthan the first dielectric constant of the first dielectric barrierregion 146. In yet another embodiment, the second dielectric constant ofthe second barrier region 150 is 2 to 1000 times higher than the firstdielectric constant of the first dielectric barrier region 146.

The second dielectric barrier region 150 is further characterized by asecond barrier height between the second dielectric barrier region 150and the first electrode region 142. In an embodiment, the second barrierheight is between 0 eV and 0.5 eV. In another embodiment, the secondbarrier height is between 0.5 eV and 1.5 eV. In another embodiment, thesecond barrier height is 1.5 eV to 3 eV. In yet another embodiment, thesecond barrier height is 0 eV to 3 eV.

In an embodiment, the second barrier height between the second barrierregion 150 and the first electrode region 142 is lower than the firstbarrier height between the first barrier region 146 and the firstelectrode region 142 by 0 eV to 1 eV. In another embodiment, the secondbarrier height between the second barrier region 150 and the firstelectrode region 142 is lower than the first barrier height between thefirst barrier region 146 and the first electrode region 142 by 1 eV to 2eV. In another embodiment, the second barrier height between the secondbarrier region 150 and the first electrode region 142 is lower than thefirst barrier height between the first barrier region 146 and the firstelectrode region 142 by 2 eV to 3 eV. In yet another embodiment, thesecond barrier height between the second barrier region 150 and thefirst electrode region 142 is lower than the first barrier heightbetween the first barrier region 146 and the first electrode region 142by 0 eV to 3 eV.

The second dielectric barrier region 150 comprises a second barriermaterial. In an embodiment, the second dielectric barrier region 150 maycomprise a dielectric based on a single metal oxide, a single metalnitride, or a single metal oxynitride of W, Ni, Mo, Cu, Ti, Ta, Hf orZr. In another embodiment, the second dielectric barrier region 150 maycomprise a dielectric based on a multiple metal oxide, a multiple metalnitride, or a multiple metal oxynitride containing metals chosen from agroup consisting of W, Ni, Mo, Cu, Ti, Ta, Hf, Sr, Ba, Pr, Ca, and Mn.For example, a multiple metal oxides may be SrTiO_(x), BaTiO_(x), orPrCaMnO_(x), where x can be any value up to a value required to achievefull stoichiometry. In an embodiment, the second dielectric barrierregion 150 may be a material comprising at least one element differentfrom elements that comprise the first dielectric barrier region 146.

FIG. 2 c shows an example embodiment wherein the second dielectricbarrier region 150 comprises a second dielectric sub-region 152comprising a dielectric whose composition departs from itsstoichiometric composition by 10 to 30%. In another embodiment, thesecond dielectric barrier region 150 may comprise a second dielectricsub-region 152 comprising a dielectric whose composition departs fromits stoichiometric composition by 10 to 30%. In another embodiment, thesecond dielectric barrier region 150 may comprise a second dielectricsub-region 152 comprising a dielectric whose composition departs fromits stoichiometric composition by 30% to 50%. In another embodiment, thesecond dielectric barrier region 150 may comprise a second dielectricsub-region 152 comprising a dielectric whose composition departs fromits stoichiometric composition by 50% to 70%. In yet another embodiment,the second dielectric barrier region 150 may comprise a seconddielectric sub-region 152 comprising a dielectric whose compositiondeparts from its stoichiometric composition by 10% to 70%. It is to beunderstood that while in the embodiment in FIG. 2 c, the seconddielectric sub-region 152 is located in the upper portion of the seconddielectric barrier region 150, other embodiments may have the seconddielectric sub-region 152 located anywhere within the second dielectricbarrier region 150.

In an embodiment, the composition of the second dielectric barrierregion 150 may be graded such that its composition varies continuouslyacross its thickness by 10 to 30%. In another embodiment, thecomposition of the second dielectric barrier region 150 may be gradedsuch that its composition varies continuously across its thickness by 30to 50%. In an embodiment, the composition of the second dielectricbarrier region 150 may be graded such that its composition variescontinuously across its thickness by 50 to 70%. In yet anotherembodiment, the composition of the second dielectric barrier region 150may be graded such that its composition varies continuously across itsthickness by 10 to 70%.

In an embodiment, the second dielectric barrier region 150 may be indirect contact with the first dielectric barrier region 146. In anotherembodiment, the second dielectric barrier region 150 may be separatedfrom the first dielectric barrier region 142 by one or more interfaciallayers comprising at least one element different from elements thatcomprise either the first electrode region 142 or the second dielectricbarrier region 150.

Referring to FIG. 2 a, the second electrode region 154 may comprise ametallic element. In an embodiment, the second electrode region 154 maycomprise an element chosen from the group consisting Ti, Ta, Pt, Ru, Ni,W, Al, and Cu. In another embodiment, the second electrode region 154may comprise a metal oxide or a metal nitride, such as TiN, TaN, WO,SrRuO, etc. It is to be understood that metal oxides and metal nitridesmay have a rage of composition. In another embodiment, the secondelectrode region 154 may comprise a doped semiconductor, such as heavilydoped Si or Ge. In an embodiment, the second electrode region 154contains at least one element which the first electrode region 142 doesnot contain. In another embodiment, the second electrode region 154comprises the same elements as the first electrode region 142.

In any given embodiment, the material choice for the second electroderegion 154 may be made based upon the work function or the effectivework function of the material. An ordinary person skilled in the artwill appreciate that for a metallic material, a more practical parametermay be the effective work function, which may be an apparent workfunction specific to the system being measured, instead of the workfunction measured in relation to vacuum energy level. In an embodiment,the second electrode region 154 may comprise a metal whose work functionor the effective work function ranges from 2.7 eV to 3.5 eV. In anotherembodiment, the second electrode region 154 may comprise a metal whosework function or the effective work function ranges from 3.5 eV to 4.3eV. In yet another embodiment, the second electrode region 154 maycomprise a metal whose work function or the effective work functionranges from 2.7 eV to 4.3 eV.

In an embodiment, the second electrode region 154 may be in directcontact with the second dielectric barrier region 150. In anotherembodiment, the second electrode region 154 may be separated by one ormore interfacial layers comprising a material comprising at least oneelement different from elements that comprise either the secondelectrode region 154 or the second dielectric barrier region 150.

FIG. 3 shows an example embodiment of an isolated memory stack 180. Afirst electrode region 160, a first dielectric barrier region 164, asecond dielectric barrier region 168, and second electrode region 176may be characterized by substantially the same compositions, structures,and properties as the first electrode region 142, the first dielectricbarrier region 146, the second dielectric barrier region 150, and thesecond electrode region 154, respectively, as described in reference toFIG. 2 a for the isolated memory stack 158.

Referring to FIG. 3, the isolated memory stack 180 further comprises athird dielectric barrier region 172 between the second dielectricbarrier region 168 and the second electrode region 176. In otherembodiments, the third dielectric barrier region 172 may be referred toas a third memory barrier region.

The third dielectric barrier region 172 has a third thickness and athird dielectric constant. In an embodiment the third thickness can be0.5-2 nm. In another embodiment, the third thickness can be 2-5 nm. Inanother embodiment, the third thickness can be 5-10 nm. In yet anotherembodiment, the third thickness can be 0.5-10 nm.

It is to be understood that the third dielectric barrier region 172 maybe substantially smooth and/or substantially planar in some embodiments.In other embodiments, the third dielectric barrier region 172 may not besubstantially smooth and/or substantially planar. Accordingly, the thirdthickness of the third dielectric barrier region 172 may not be a singlevalue. In an embodiment, the third thickness may be an average thicknessof multiple measurements across the third dielectric barrier region 172.In another embodiment, the third thickness may be a minimum thickness ofmultiple measurements across the third dielectric barrier region 172. Inanother embodiment, the third thickness may be a maximum thickness ofmultiple measurements across the third dielectric barrier region 172. Inyet another embodiment, the third thickness may be a thickness measuredacross at least one location across the third dielectric barrier region172.

In an embodiment the third dielectric constant can be 3-7. In anotherembodiment, the third dielectric constant can be 7-10. In an embodiment,the third thickness and/or the third dielectric constant of the thirddielectric barrier region 172 may be substantially the same as the firstthickness and/or the first dielectric constant of the first dielectricbarrier region 164. In other embodiments, the third thickness and/or thethird dielectric constant may be substantially different from the firstthickness and/or the first dielectric constant.

The third dielectric barrier region 172 is further characterized by athird barrier height between the third dielectric barrier region 172 andthe first electrode region 160. A barrier height carries the ordinarymeaning of the energy difference between the conduction band edge of adielectric material and the work function or the effective work functionof a metallic material. In an embodiment, the third barrier height isbetween 0.5 eV and 2.0 eV. In another embodiment, the third barrierheight is between 2.0 eV and 3.0 eV. In another embodiment, the thirdbarrier height is between 3.0 eV and 4 eV. In yet another embodiment,the third barrier height is between 0.5 eV and 4 eV.

In an embodiment, the third barrier height between the third dielectricbarrier region 172 and the first electrode region 160 may besubstantially the same as the first barrier height between the firstdielectric barrier region 164 and the first electrode region 160. Inother embodiments, the third barrier height may be substantiallydifferent from the first barrier height.

The third dielectric barrier region 172 comprises a third barriermaterial. In an embodiment, the third dielectric barrier region 172 maycomprise a dielectric based on a single metal oxide, a single metalnitride, or a single metal oxynitride of Si, Al, Mg, La, Gd, Dy, Pd orSc. For example, a single metal oxide may be SiO₂ or Al₂O₃. In anotherembodiment, the third dielectric barrier region 172 may comprise adielectric based on a multiple metal oxide, a multiple metal nitride, ora multiple metal oxynitride containing metals chosen from a groupconsisting of Si, Al, Hf, Zr, Mg, La, Y, Gd, Dy, Pd and Sc. For example,a multiple metal oxide may be HfSiO₄ or LaAlO₃.

In an embodiment, the third dielectric barrier region 172 may comprisesubstantially the same dielectric material as that which comprises thefirst dielectric barrier region 164. In other embodiments, the thirddielectric barrier region 172 may comprise substantially differentdielectric material as that which comprises the first dielectric barrierregion 164. In yet other embodiment, the third dielectric barrier region172 may consist of substantially the same dielectric material as thatwhich the first dielectric barrier region 164 consists of.

In an embodiment, the third dielectric barrier region 172 may comprise athird dielectric sub-region (not shown) comprising a dielectric whosecomposition departs from its stoichiometric composition by 10 to 30%. Inanother embodiment, the third dielectric barrier region 172 may comprisea third dielectric sub-region (not shown) comprising a dielectric whosecomposition departs from its stoichiometric composition by 30% to 50%.In another embodiment, the third dielectric barrier region 150 maycomprise a third dielectric sub-region (not shown) comprising adielectric whose composition departs from its stoichiometric compositionby 50% to 70%. In yet another embodiment, the third dielectric barrierregion 150 may comprise a third dielectric sub-region (not shown)comprising a dielectric whose composition departs from itsstoichiometric composition by 10% to 70%.

In an embodiment, the composition of the third dielectric barrier region172 may be graded such that its composition varies continuously acrossits thickness by 10 to 30%. In another embodiment, the composition ofthe third dielectric barrier region 172 may be graded such that itscomposition varies continuously across its thickness by 30 to 50%. In anembodiment, the composition of the third dielectric barrier region 172may be graded such that its composition varies continuously across itsthickness by 50 to 70%. In yet another embodiment, the composition ofthe third dielectric barrier region 172 may be graded such that itscomposition varies continuously across its thickness by 10 to 70%.

In an embodiment, the third dielectric barrier region 172 may be indirect contact with the second dielectric barrier region 168. In anotherembodiment, the third dielectric barrier region 172 may be separated byone or more interfacial layers comprising at least one element differentfrom elements that comprise either the third dielectric barrier region172 or the second dielectric barrier region 168.

FIG. 4 a depicts a schematic energy-distance diagram of a memory stack200 comprising a first dielectric barrier region 208 and a seconddielectric barrier region 212 under a condition where a negative voltagebias is applied to the first electrode region 204. Under certain voltageconditions, the memory stack 200 may result in a condition where theelectric current is produced by electrons predominantly tunnelingthrough the first dielectric barrier region 208. Under other voltageconditions, the memory stack 200 may result in a condition where theelectric current is produced by electrons tunneling through the firstdielectric barrier region 208 and through the second dielectric barrierregion 212.

FIG. 4 b depicts a schematic energy-distance diagram of a memory stack220 comprising a first dielectric barrier region 228 and a seconddielectric barrier region 232 under a condition where a negative voltagebias is applied to the second electrode region 236. Under certainvoltage conditions, the memory stack 220 may result in a condition wherethe electric current is produced by electrons tunneling through thesecond dielectric barrier region 232 and through the first dielectricbarrier region 228.

Referring to FIG. 4 a and FIG. 4 b, in an embodiment, the magnitude ofthe current produced through the memory stack 200 under a negativevoltage bias applied to the first electrode region 204 will besubstantially greater than the magnitude of the current produced throughthe memory stack 220 comprising identical components as the memory stack200 under a negative voltage bias applied to the second electrode region236.

FIG. 5 a depicts a schematic energy-distance diagram of a memory stack240 comprising a first dielectric barrier region 248, a seconddielectric barrier region 252, and a third dielectric barrier region 256under a condition where a negative voltage bias is applied to the firstelectrode region 244. Under certain voltage conditions, the memory stack240 may result in a condition where the electric current is produced byelectrons predominantly tunneling through the first dielectric barrierregion 248. Under other voltage conditions, the memory stack 240 mayresult in a condition where the electric current is produced byelectrons tunneling through the first dielectric barrier region 248, thesecond dielectric barrier region 252, and through the third dielectricbarrier region 256. Under yet other voltage conditions, the memory stack240 may result in a condition where the electric current is produced byelectrons tunneling through the first dielectric barrier region 248 andthrough the third dielectric barrier region 256.

FIG. 5 b depicts a schematic energy-distance diagram of a memory stack270 comprising a first dielectric barrier region 278, a seconddielectric barrier region 282, and a third dielectric barrier region 286under a condition where a negative voltage bias is applied to the secondelectrode region 290. Under certain voltage conditions, the memory stack270 may result in a condition where the electric current is produced byelectrons predominantly tunneling through the third dielectric barrierregion 286. Under other voltage conditions, the memory stack 270 mayresult in a condition where the electric current is produced byelectrons tunneling through the third dielectric barrier region 286, thesecond dielectric barrier region 282, and through the first dielectricbarrier region 278. Under yet other voltage conditions, the memory stack270 may result in a condition where the electric current is produced byelectrons tunneling through the third dielectric barrier region 286 andthrough the first dielectric barrier region 278.

Referring to FIG. 5 a and FIG. 5 b, in an embodiment, the magnitude ofthe current produced through the memory stack 240 under a negativevoltage bias applied to the first electrode region 244 will besubstantially similar to the magnitude of the current produced throughthe memory stack 270 comprising identical components as the memory stack240 under a negative voltage bias applied to the second electrode region290.

FIGS. 6 through 9 are cross-sectional views illustrating the steps offabricating a semiconductor device including a memory stack similar tothe memory stack 158 or the memory stack 180 according to someembodiments.

Referring to FIG. 6, a plurality of transistors comprising gatedielectrics 305 and 308, transistor gates 306 and 307, spacers 310, 312,309, and 311, drain regions 302 and 304, and a source region 303 may beformed on a substrate 300, as described herein. It will be understoodthat while some types of transistors that may be used are described withsome specificity herein, in various other embodiments, widely varyingtypes of transistors such as planar transistors, vertical transistors,multigate transistors, transistors based on nanotubes, transistors basedon nanowires, transistors based on spin transfer, transistors based onburied channel, transistors based on quantum wells, and various othertransistors based on different materials and structures may be used.

An isolation 301 may be formed on the substrate 300 to define an activearea. The isolation 301 may be formed by a shallow trench isolation(STI) process using an oxide formed by methods such as high-densityplasma chemical vapor deposition (HDPCVD), chemical vapor deposition(CVD), spin-on glass process (SOG), or comparable methods. Other typesof isolation may also be used in other embodiments.

Gate dielectrics 305 and 308 comprising a silicon dioxide may be formedon a substrate 300 by using thermal oxidation, oxygen radicals, in-situsteam generation, or comparable methods. In other embodiments, gatedielectrics 305 and 308 may also comprise a high-K dielectric such asHfO₂, ZrO₂, HfSiO₄, etc. In yet other embodiments, other types ofmaterials maybe used to generate a field effect in transistors.

Transistor gates 306 and 307, which may be n-type or p-type, may beformed on gate dielectrics 305 and 308. Transistor gates 306 and 307 maybe n-type gates formed using polycrystalline Si doped with n-typeimpurities such as P or As. Transistor gates 306 and 307 may be p-typegates formed using polycrystalline Si doped with p-type impurities suchas B. Transistor gates 306 and 307 may be doped in-situ duringpolycrystalline Si deposition or doped ex-situ using ion implantation.Photolithography steps comprising a resist deposition, exposure, andresist development may be employed to define transistor gates 306 and307. In some embodiments, transistor gates 306 and 307 may comprisesilicide layers, such as NiSi and CoSi. In other embodiments, transistorgates 306 and 307 may comprise other materials.

Transistor gates 306 and 307 may be n-type metal gates comprising metalssuch as Hf, Zr, Ti, Ta, and Al. Transistors gates 306 and 307 may bep-type metal gates comprising metals such as Ru, Pd, Pt, Co, Ni, Ti, Ta,Al, W, C, and Mo. In other embodiments, other types of metals may beused for transistor gates 306 and 307.

The source region 303 and drain regions 302 and 304 may be formed by ionimplantation of n-type dopants for n-channel transistors or by ionimplantation of p-type dopants for p-channel transistors. In otherembodiments, the source region 303 and drain regions 302 and 304 maycomprise other impurities such as Ge or C to impart compressive ortensile strain on the transistor channel. The source region 303 may forma common source between a plurality of transistors. Ion implantationsteps used to form the source region 303 and drain regions 302 and 304may “self-aligned,” using transistor gates 306 and 307 and relatedsacrificial structures such as hard masks (not shown) and photoresistlayers (not shown) as ion implantation masks. Ion implantation steps mayalso be “self-aligned” using spacers 309, 310, 311, and 312.

The formation of a first interlayer dielectric 316 may begin over aplurality of transistors by deposition of a preliminary first interlayerdielectric using processes such as CVD, plasma-enhanced vapor deposition(PECVD), HDPCVD, or SOG, which may be followed by a subsequent chemicalmechanical planarization (CMP) process. The preliminary first interlayerdielectric may comprise SiO₂. The preliminary first interlayerdielectric may further comprise B and/or P. Different interlayerdielectric materials and processes may be used in other embodiments.

A source contact structure 314 and drain contact structures 310 and 312may be formed by first forming contact holes through the preliminaryfirst interlayer dielectric using photolithography followed by contactetch processes. Contact etch processes may be performed through thepreliminary first interlayer dielectric using a reactive ion etchprocess using reactive ions or neutrals comprising F or Cl. Thus formedcontact holes may be filled by a contact fill step where a conductivematerial such as heavily doped polycrystalline Si or a metal such as Wis deposited into and over the first contact holes. The contact fillstep may be performed using CVD, physical vapor deposition (PVD), oratomic layer deposition (ALD). The deposited Si or metal may further besubject to a CMP step to expose a substantially planar surface exposingthe first interlayer dielectric 316, the source contact structure 314,and drain contract structures 310 and 312. Other structures, materials,and processes may be used to form a source contact structure 314 anddrain contact structures 310 and 312.

First metal line structures 322, 324, and 326 comprising W, Al, Cu, or asimilar metal may be formed over the surface exposing the firstinterlayer dielectric 316, the source contact structure 314, and draincontract structures 310 and 312. In an embodiment, the first metal linestructures 322, 324, and 326 may be formed by a subtractive metalprocess. In a subtractive metal process, a preliminary first metal layermay be formed by a metal deposition process, followed by aphotolithography step, followed by a metal etch step. The metaldeposition process may be performed using CVD, PVD, ALD, or comparablemethods. Metal etch processes may be performed using a reactive ion etchprocess using reactive ions or neutrals comprising F or Cl. A secondinterlayer dielectric 320 may subsequently formed by first depositing apreliminary second interlayer dielectric using processes such as CVD,PECVD, HDPCVD, SOG, or comparable method. A subsequent CMP may beperformed to planarize the preliminary second interlayer dielectric. Inother embodiments, the first metal line structures 322, 324, and 326 maybe formed by a Cu damascene metallization process where the secondpreliminary interlayer dielectric deposition may be followed by aphotolithography step, followed by an interlayer dielectric etch,followed by an electroplating step, followed by a metal CMP step. Theresulting surface is a substantially co-planar surface exposing firstmetal line structures 322, 324, and 326 and the second interlayerdielectric 320. Other structures, materials, and methods may be used toform first metal line structures 322, 324, and 326.

First via structures 330 and 332 may be formed over the first metal linestructures 322, 324, and 326 and the second interlayer dielectric 320 byfirst depositing a preliminary third interlayer dielectric usingprocesses such as CVD, PECVD, HDPCVD, SOG, or other comparableprocesses. A subsequent CMP may follow. The preliminary third interlayerdielectric may comprise SiO₂. The preliminary third interlayerdielectric may further comprise C or F. Other materials and methods maybe used to form the preliminary third interlayer dielectric.

First via holes may be formed through the preliminary third interlayerdielectric using photolithography followed by etch processes. Etchprocesses may be performed through the preliminary third interlayerdielectric using a reactive ion etch processes using reactive ions orneutrals comprising F or Cl. Thus formed first via holes may be filledby a first via fill step where a conductive material such as Al or W isdeposited into and over the first via holes. In an embodiment, the firstvia fill step may be performed using CVD, physical vapor deposition(PVD), ALD, or other comparable processes. The deposited Al or W mayfurther be subject to a CMP step to expose a substantially planarsurface exposing a third interlayer dielectric 334 and first viastructures 330 and 332. Other structures, materials, and methods may beused to form first via structures 330 and 332.

In other embodiments, first via structures 330 and 332 may be formed bya Cu damascene metallization process where a preliminary thirdinterlayer dielectric deposition may be followed by a photolithographystep, followed by a first via etch, followed by an electroplating step,followed by a metal CMP step. The resulting surface is a substantiallyco-planar surface exposing first via structures 330 and 332 and thethird interlayer dielectric 334. Other structures, materials, andmethods may be used to form first via structures 330 and 332.

Referring to FIG. 7, a preliminary memory stack comprising a preliminaryfirst electrode region 336, a preliminary first dielectric barrierregion 338, a preliminary second dielectric barrier region 340, and apreliminary second electrode region 342 may be formed on the surfaceexposing first via structures 330 and 332 and the third interlayerdielectric 334. The preliminary first electrode region 336 may be formedusing deposition processes such as CVD, PVD, ALD, electroplating, orother comparable processes. Other methods may be used to form thepreliminary first electrode region 336.

In an embodiment, the preliminary first dielectric barrier region 338may be formed on the preliminary first electrode region 336 usingdeposition processes such as CVD, PVD, ALD, or other comparableprocesses. The deposition condition may be controlled so that thecomposition of the first dielectric barrier region 338 is stoichiometricor sub-stoichiometric. For example, by performing deposition in a lessoxidizing ambience, a sub-stoichiometric oxide may be formed. In anotherembodiment, the deposition may be performed using multiple metal sourcesso that the first dielectric barrier region 338 comprises a multiplemetal oxide. For example, by performing an ALD process using a precursorcontaining Hf in addition to a precursor containing Si, a multiple metaloxide such as HfSiO₄ may be formed.

In another embodiment, the preliminary first dielectric barrier region338 may be formed by first depositing a metal followed by oxidation,nitridization, or oxynitridization. For example, a metal such as Al orMg may first be first deposited using CVD, PVD, ALD, electroplating, orother comparable processes, followed by oxidation, nitridization, oroxynitridization in oxidizing or nitridizing environment to form Al₂O₃,AlN, AlON, MgO, MgN, or MgON. In another embodiment, a combination ofmetals such as Hf and Si may be co-deposited using CVD, PVD, ALD,electroplating, or other comparable processes to form HfSiO₄. Theoxidizing or nitridizing environment may be controlled so that thecomposition of the preliminary first dielectric barrier region 338 issub-stoichiometric to varying degrees.

In another embodiment, the preliminary first dielectric barrier region338 may be formed by first depositing a metal followed by deposition ofan oxide or a nitride. A subsequent thermal anneal may be performed. Forexample, a metal such as Al or Mg may first be deposited using CVD, PVD,ALD, electroplating, or other comparable processes, followed bydeposition of Al₂O₃ or MgO using processes such as CVD, PVD, ALD, orother comparable processes, to form a first dielectric sub-region (notshown) whose composition departs from a stoichiometric composition. Inyet another embodiment, the resulting composition of the preliminaryfirst dielectric barrier region 338 may be graded such that itsstoichiometry varies continuously across its thickness.

In another embodiment, the preliminary first dielectric barrier region338 may be formed by first depositing an oxide or a nitride followed bydeposition of a metal. A subsequent thermal anneal may be performed. Forexample, an oxide such as metal such as Al₂O₃ or MgO may be first formedusing processes such as CVD, PVD, ALD, or other comparable processes,followed by deposition of a metal such as Al or Mg using CVD, PVD, ALD,electroplating, or other comparable processes, to form a firstdielectric sub-region (not shown) whose composition departs from astoichiometric composition. In yet another embodiment, the resultingcomposition of the preliminary first dielectric barrier region 338 maybe graded such that its stoichiometry varies continuously across itsthickness.

In various other embodiments, other materials and methods may be used toform the preliminary first dielectric barrier region 338.

Referring again to FIG. 7, the preliminary second dielectric barrierregion 340 may be formed on the preliminary first dielectric barrierregion 338 using any of the steps described above to describe theformation of the preliminary first dielectric barrier region 338. Inaddition, a preliminary third dielectric barrier region (not shown) maybe formed on the preliminary second dielectric barrier region 340 usingany of the steps described above to describe the formation of thepreliminary first dielectric barrier region 338. Other materials methodsmay be used to form the preliminary second dielectric barrier region 340and/or the preliminary third dielectric barrier region.

Referring again to FIG. 7, the preliminary second electrode region 342may be formed using deposition processes such as CVD, PVD, ALD,electroplating, or other comparable processes. Subsequently, aphotolithography process (not shown) and a subsequent reactive ion etchprocess using reactive ions or neutrals comprising F or Cl may beperformed to form a plurality of memory stacks 358 and 368 shown in FIG.8. Memory stacks 358 and 368 comprise first electrode regions 350 and360, first dielectric barrier regions 352 and 362, second dielectricbarrier regions 354 and 364, and second electrode regions 356 and 366. Afourth interlayer dielectric 368 may subsequently be formed bydepositing a dielectric over the memory stacks 358 and 368 usingprocesses such as CVD, PECVD, HDPCVD, SOG, or other comparableprocesses. A subsequent CMP may follow to expose a substantially planarsurface exposing memory stacks 358 and 368 and the fourth interlayerdielectric 368. The fourth interlayer dielectric may comprise SiO₂. Thefourth interlayer dielectric 368 may further comprise C or F. Variousother materials, structures, and methods may be used to form variousstructures described in this paragraph.

Referring to FIG. 9, a second metal line structure 370 and a third metalline structure 376 may be formed over memory stacks 358 and 368. Thesecond metal line structure 370 and the third metal line structure 376may be connected by a second via structure 372. The second metal linestructure 370 and the third metal line structure 376 may comprise W, Al,Cu, or other comparable metals and may be formed by using substantiallythe same process steps used to form the first metal line structures 322,324, and 326 described above. The second via structure 372 may compriseW, Al, Cu, or other comparable metals and may be formed by usingsubstantially the same process steps used to form first via structures330 and 332. Various other materials, structures, and methods may beused to form various structures described in this paragraph.

FIG. 10 is a top-down view illustrating an example embodiment of amemory stack 410 in a “cross-point” configuration. The memory stack isbetween a top interconnect 404 and a bottom interconnect 411 (hiddenhere in the top-down view by the top interconnect 404). The topinterconnect 404 may run along a direction such as a column directionillustrated by a legend 430. The bottom interconnect 411 may run along adirection such as a row direction illustrated by the legend 430. Thecolumn direction and the row direction may be substantiallyperpendicular. The top interconnect 404 and the bottom interconnect 411may comprise W, Al, Cu, or a comparable metal and may be formed by usingsubstantially the same process steps used to form the first metal linestructures 322, 324, and 326 shown in FIG. 9. The memory stack 410 maybe electrically coupled to the top interconnect 404 and the bottominterconnect 411. A memory array 420 comprising a plurality of memorystacks may be formed by placing a plurality of memory stacks between aplurality of top interconnects 401, 402, 403, and 404 and a plurality ofbottom interconnects 411, 412, 413, and 414.

FIG. 11 is a cross-sectional view of a memory device 480 in“cross-point” configuration. The memory device comprises a memory stack470. The memory stack 470 comprises a first electrode region 462, afirst dielectric barrier region 460, a second dielectric barrier region458, and a second electrode region 456. The memory stack 470 comprisessubstantially the same elements that comprise the example embodiment ofthe memory stack 140 in FIG. 2 a. The memory device further comprises atop metal interconnect 454 and a bottom metal interconnect 464. Thememory stack 470 may be electrically coupled to the top metalinterconnect 454 and the bottom metal interconnect 464. The top metalinterconnect 454 may run along a first horizontal direction. The bottominterconnect 464 may run along a second horizontal direction, whereinthe second horizontal direction may be substantially perpendicular tothe first horizontal direction. In an embodiment, there may be aplurality of memory devices 480 and 490. The memory device 480 and thememory device 490 may be separated by a space 452. The space 452 maycomprise a dielectric. The space 452 may also comprise a void.

FIG. 12 is a cross-sectional view of a memory device 530 in a“cross-point” configuration. The memory device comprises a memory stack520. The memory stack 520 comprises a first electrode region 514, afirst dielectric barrier region 512, a second dielectric barrier region510, a third dielectric barrier region 508, and a second electroderegion 506. The memory stack 520 comprises substantially the sameelements of the memory stack 158 in FIG. 3. The memory device furthercomprises a top metal interconnect 504 and a bottom metal interconnect514. The memory stack 520 may be electrically coupled to the topinterconnect 504 and the bottom metal interconnect 516. The topinterconnect 504 may run along a first horizontal direction. The bottominterconnect 516 may run along a second horizontal direction, whereinthe second horizontal direction is may be substantially perpendicular tothe first horizontal direction. In an embodiment, there may be aplurality of memory devices 530 and 540. The memory device 530 and thememory device 540 may be separated by a space 502. The space 502 maycomprise a dielectric. The space 502 may also comprise a void.

It is to be understood that while FIG. 11 and FIG. 12 show memory deviceembodiments in a “cross point” configuration without selection devices,other embodiments may have memory devices coupled selection devices. Inan embodiment, memory devices may be coupled to transistors. In anotherembodiment, memory devices may be coupled to diodes. In yet anotherembodiment, memory devices may be coupled to chalcogenide-basedswitches.

In reference to FIG. 11, in an embodiment, memory devices 480 and 490may be directly coupled to selection devices (not shown) through thefirst electrode region 462 or through the second electrode region 456.In other embodiments, memory devices may be coupled to selection devices(not shown) through the top metal interconnect 454 or the bottom metalinterconnect 464. In reference to FIG. 12, in an embodiment, memorydevices 530 and 540 may be directly coupled to selection devices (notshown) through the first electrode region 514 or through the secondelectrode region 506. In other embodiments, memory devices may becoupled to selection devices (not shown) through the top metalinterconnect 504 or the bottom metal interconnect 516.

In reference to FIG. 11, it is to be understood that while embodimentsdescribed herein illustrate memory devices 480 and 490 in a verticalarrangement, other embodiments may have other arrangements. In anembodiment, memory devices 480 and 490 may be horizontally arranged. Inan example embodiment, the memory device 480 may comprise the memorystack 470 arranged horizontally from left to right, with the firstelectrode region 462 on the left, the first dielectric barrier region460 to the right of the first electrode region 462, the seconddielectric barrier region 458 to the right of the first dielectricbarrier region 460, and the second electrode region 456 to the right ofthe second dielectric barrier region 458.

Similarly, while embodiments described in FIG. 12 illustrate memorydevices 530 and 540 in a vertical arrangement, other embodiments mayhave other arrangements. In an embodiment, memory devices 530 and 540may be horizontally arranged. In an example embodiment, the memorydevice 530 may comprise the memory stack 520 arranged horizontally fromleft to right, with the first electrode region 514 on the left, thefirst dielectric barrier region 512 to the right of the first electroderegion 514, the second dielectric barrier region 510 to the right of thefirst dielectric barrier region 512, the third dielectric barrier region508 to the right of the second dielectric barrier region 510, and thesecond electrode region 506 to the right of the third dielectric barrierregion 508.

I claim:
 1. A memory device comprising: a transistor, a contact, firstand second electrode regions, and an interlayer dielectric; a firstmemory barrier region, between the first and second electrode regions,having a first thickness, a first dielectric constant, and first memorybarrier sidewalls; a second memory barrier region, between the secondelectrode region and the first memory barrier region, having a secondthickness different from the first thickness, a second dielectricconstant different from the first dielectric constant, and second memorybarrier sidewalls; wherein (a) the first and second memory barriersidewalls are adjacent to the interlayer dielectric and aresubstantially aligned; and (b) the first electrode region is coupled tothe transistor through the contact.
 2. The memory device in claim 1,further comprising a third memory barrier region, between the secondelectrode region and the second memory barrier region, having a thirdthickness different from the second thickness and a third dielectricconstant different from the second dielectric constant.
 3. The memorydevice in claim 1, wherein the first memory barrier region comprises anelement chosen from the group consisting of Si, Al, Mg, La, Gd, Dy, Pdand Sc.
 4. The memory device in claim 1, wherein the first memorybarrier region comprises Al or Mg.
 5. The memory device in claim 1,wherein the second memory barrier region comprises an element chosenfrom the group consisting of W, Ni, Mo, Cu, Ti, Ta, Hf, Sr, Ba, Pr, Caand Mn.
 6. The memory device in claim 1, wherein the first thickness is0.5 nm to 2 nm.
 7. The memory device in claim 1 wherein the secondthickness is 5 nm to 10 nm.
 8. The memory device in claim 2, wherein thethird thickness is substantially equal to the first thickness.
 9. Amemory device comprising: a first memory barrier region, between firstand second electrode regions, having a first thickness, a firstdielectric constant, and first memory barrier sidewalls; and a secondmemory barrier region, between the second electrode region and the firstmemory barrier region, having a second dielectric constant differentfrom the first dielectric constant, and second memory barrier sidewalls;wherein (a) the first and second memory barrier sidewalls are adjacentto an interlayer dielectric and are substantially aligned; and (b) thefirst electrode region is coupled to a transistor.
 10. The device ofclaim 9 comprising a third memory barrier region, between the secondelectrode region and the second memory barrier region, having a thirddielectric constant different from the second dielectric constant. 11.The device of claim 9, wherein the first memory barrier region comprisesan element chosen from the group consisting of Si, Al, Mg, La, Gd, Dy,Pd and Sc.
 12. The device of claim 9, wherein the first memory barrierregion comprises Al or Mg.
 13. The device of claim 9, wherein the secondmemory barrier region comprises an element chosen from the groupconsisting of W, Ni, Mo, Cu, Ti, Ta, Hf, Sr, Ba, Pr, Ca and Mn.
 14. Thedevice of claim 9, wherein the first thickness is 0.5 nm to 2 nm. 15.The device of claim 9 wherein the second memory barrier region has asecond thickness that is 5 nm to 10 nm.
 16. The device of claim 10,wherein the third memory barrier region has a third thicknesssubstantially equal to the first thickness.
 17. The device of claim 9,where the second memory barrier region has a second thickness differentfrom the first thickness.
 18. A memory device comprising: a first memorybarrier region, between first and second electrode regions, having afirst thickness, a first dielectric constant, and first memory barriersidewalls; and a second memory barrier region, between the secondelectrode region and the first memory barrier region, having a seconddielectric constant different from the first dielectric constant, andsecond memory barrier sidewalls; wherein (a) the first and second memorybarrier sidewalls directly contact an interlayer dielectric; and (b) thefirst electrode region is coupled to a transistor through a contact. 19.The device of claim 18 comprising a third memory barrier region, betweenthe second electrode region and the second memory barrier region anddirectly contacting the interlayer dielectric, having a third dielectricconstant different from the second dielectric constant.
 20. The deviceof claim 18, where the second memory barrier region has a secondthickness different from the first thickness.